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An UHV box coater for VUV reflective coatings on mirror substrates of up to 95 cm in diameter

Signature mark NL 292/0562
Subject Publikation Sonderdruck (1)
Author Bergmaier, Andreas
Dollinger, Günther
Friese, Jürgen
Karsch, Stefan
Kienle, Paul
Körner, Hans Joachim
Maier-Komor, Peter
Title An UHV box coater for VUV reflective coatings on mirror substrates of up to 95 cm in diameter
Contains Am Physik-Department der Technischen Universität München entstandene Studie
Places Amsterdam
Duration 09.1997
Scope 5 Bl. gedr.
Subject area Physik. Atom-, Kern- und Elementarteilchen-Physik <310.07>
Further information Published in: Nuclear instruments and methods in physics research A 397, Nr. 1, S. 194-199
Formal information Languages: Englisch
Rights notice CC BY-SA 4.0
Permalink https://digital-dev.deutsches-museum.de/item/NL-292-0562
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